Programming memories with multi-level pass signal

ABSTRACT

Memories and methods for programming memories with multi-level pass signals are provided. One method includes programming cells of the memory selected to be programmed to a particular target data state of the memory, using program disturb to program cells of the memory selected to be programmed to target data states that are lower than the particular target data state while programming cells of the memory selected to be programmed to the particular target data state, and boosting a channel voltage for cells of the memory selected to be programmed to the target data states that are lower than the particular target data state. Boosting may include using a multi-step pass signal.

TECHNICAL FIELD

The present embodiments relate generally to memory devices and aparticular embodiment relates to programming in memory devices.

BACKGROUND

Memory devices (which are sometimes referred to herein as “memories”)are typically provided as internal, semiconductor, integrated circuitsin computers or other electronic systems. There are many different typesof memory including random-access memory (RAM), read only memory (ROM),dynamic random access memory (DRAM), synchronous dynamic random accessmemory (SDRAM), and flash memory.

Flash memory devices have developed into a popular source ofnon-volatile memory for a wide range of electronic applications. Flashmemory devices typically use a one-transistor memory cell that allowsfor high memory densities, high reliability, and low power consumption.Changes in threshold voltage of the cells, through programming of acharge storage structure, such as floating gates or trapping layers orother physical phenomena, determine the data state of each cell. Commonelectronic systems that utilize flash memory devices include, but arenot limited to, personal computers, personal digital assistants (PDAs),digital cameras, digital media players, digital recorders, games,appliances, vehicles, wireless devices, cellular telephones, andremovable memory modules, and the uses for flash memory continue toexpand.

As the performance and complexity of electronic systems increase, therequirement for additional memory in a system also increases. However,in order to continue to reduce the costs of the system, the parts countmust be kept to a minimum. This can be accomplished by increasing thememory density of an integrated circuit by using such technologies asmultilevel cells (MLC). For example, MLC NAND flash memory is a verycost effective non-volatile memory. In a four level MLC, there are fourpotential final data states. One technique used to increase the memorycapacity of a NAND memory device is to form the memory array in a threedimensional (3D) manner. In other words, instead of the series memorystrings being formed horizontally on a memory die which is typicallyreferred to as 2D memory, the series strings are formed vertically on asubstrate.

Programming in memories is typically accomplished by applying aplurality of programming pulses at a programming voltage (V_(pgm)),separated by verify pulses, to program each memory cell of a selectedgroup (e.g., a selected page) of memory cells to a respective targetdata state (which may be an interim or final data state). With such ascheme, the programming pulses are applied to access lines (e.g., wordlines) for selected cells. After each programming pulse, a verify pulseor a plurality of verify pulses are used to verify the programming ofthe selected cells. Current programming uses many programming pulses inan incremental step pulse programming scheme, where each programmingpulse is a single pulse that moves cell threshold voltage by a certainamount, with V_(pgm) increasing with each subsequent programming pulse.

NAND memories are typically programmed by holding a channel of aselected cell to be programmed at a reference voltage (e.g., ground), orat a selective slow programming convergence (SSPC) voltage, and applyingthe programming pulses and verify pulses described above. Programmingusing this method is applicable for any programmed target data state(e.g., L1, L2, L3 in the case of a two bits per cell multi-level memory,where L0 may be an “erased” target data state). The first programmingoperation typically uses a V_(pgm) high enough to start programmingselected cells to a first programmed data state (e.g., L1), but lowenough to not overshoot the programming of those cells to the secondprogrammed target data state (e.g., L2). The program voltage increasessequentially in subsequent operations, until the cells to be programmedto the third programmed data state (L3) are finished programming and theprogram operation is completed.

As NAND density increases with scaling, increased access line and dataline (e.g., bit line) capacitances lead to an increased programming time(T_(prog)). In addition, new array architectures used in conjunctionwith three dimensional NAND also result in increased capacitances,further driving up T_(prog). Program disturb effects, which are wellknown, are typically controlled during programming, so as to have assmall an impact on final threshold voltages in programming as can bemanaged.

For the reasons stated above and for other reasons that will becomeapparent to those skilled in the art upon reading and understanding thepresent specification, there is a need in the art for improvedprogramming time in memories.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of one embodiment of a portion of a NANDarchitecture memory array;

FIG. 2 is a block schematic of an electronic system in accordance withan embodiment of the disclosure;

FIG. 3 is a flow chart diagram of a method according to one embodimentof the present disclosure;

FIG. 4 is a waveform diagram for operation of the method of FIG. 3;

FIG. 5 is a waveform diagram for operation of another method of thepresent disclosure;

FIG. 6 is a diagram showing programming pulses versus level programmingfor embodiments of the present disclosure; and

FIG. 7 is a flow chart diagram of a method according to anotherembodiment of the present disclosure.

DETAILED DESCRIPTION

In the following detailed description, reference is made to theaccompanying drawings that form a part hereof and in which is shown, byway of illustration, specific embodiments. In the drawings, likenumerals describe substantially similar components throughout theseveral views. Other embodiments may be utilized and structural,logical, and electrical changes may be made without departing from thescope of the present disclosure. The following detailed description is,therefore, not to be taken in a limiting sense.

FIG. 1 illustrates a schematic diagram of one embodiment of a portion ofa NAND architecture memory array 101 comprising series strings ofnon-volatile memory cells. The memory array 101 comprises an array ofnon-volatile memory cells (e.g., floating gate) arranged in columns suchas series strings 104, 105. An access line (e.g., word line) WL0-WL31that spans across multiple series strings 104, 105 is coupled to thecontrol gates of each memory cell in a row in order to bias the controlgates of the memory cells in the row. Data lines, such as even/odd bitlines BL_E, BL_O, are coupled to the series strings and eventuallycoupled to sense circuitry that detect and store the state of each cellby sensing current or voltage on a selected bit line.

Each series string 104, 105 of memory cells is coupled to a source 106by a source select gate 116, 117 (e.g., transistor) and to an individualbit line BL_E, BL_O by a drain select gate 112, 113 (e.g., transistor).The source select gates 116, 117 are controlled by a source select gatecontrol line SG(S) 118 coupled to their control gates. The drain selectgates 112, 113 are controlled by a drain select gate control line SG(D)114.

FIG. 2 is a simplified block diagram of a memory device 200 according toan embodiment of the disclosure, and on which various embodiments of thedisclosure can be practiced. Memory device 200 includes an array ofmemory cells 204 arranged in rows and columns. Although the variousembodiments will be described primarily with reference to NAND memoryarrays, the various embodiments are not limited to a specificarchitecture of the memory array 204. Some examples of other arrayarchitectures suitable for the present embodiments may include NORarrays, AND arrays, and virtual ground arrays. Further, the embodimentsdescribed herein may be amenable for use with SLC and MLC memorieswithout departing from the scope of the disclosure. Also, the methodsare applicable for memories which could be read/sensed in analog format.

Row decode circuitry 208 and column decode circuitry 210 are provided todecode address signals provided to the memory device 200. Addresssignals are received and decoded to access memory array 204. Memorydevice 200 also includes input/output (I/O) control circuitry 212 tomanage input of commands, addresses and data to the memory device 200 aswell as output of data and status information from the memory device200. An address register 214 is coupled between I/O control circuitry212 and row decode circuitry 208 and column decode circuitry 210 tolatch the address signals prior to decoding. A command register 224 iscoupled between I/O control circuitry 212 and control logic 216 (whichmay include the elements and code of host 230) to latch incomingcommands. In one embodiment, control logic 216, I/O control circuitry212 and/or firmware or other circuitry can individually, in combination,or in combination with other elements, form an internal controller. Asused herein, however, a controller need not necessarily include any orall of such components. In some embodiments, a controller can comprisean internal controller (e.g., located on the same die as the memoryarray) and/or an external controller. Control logic 216 controls accessto the memory array 204 in response to the commands and generates statusinformation for an external host such as a host 230. The control logic216 is coupled to row decode circuitry 208 and column decode circuitry210 to control the row decode circuitry 208 and column decode circuitry210 in response to the received address signals. A status register 222is coupled between I/O control circuitry 212 and control logic 216 tolatch the status information for output to an external controller.

Memory device 200 receives control signals at control logic 216 over acontrol link 232. The control signals may include a chip enable CE#, acommand latch enable CLE, an address latch enable ALE, and a writeenable WE#. Memory device 200 may receive commands (in the form ofcommand signals), addresses (in the form of address signals), and data(in the form of data signals) from an external controller over amultiplexed input/output (I/O) bus 234 and output data to an externalcontroller over I/O bus 234. I/O bus 234 is also used in one embodimentto signal physically to the host 230 that housekeeping is indicated.

In a specific example, commands are received over input/output (I/O)pins [7:0] of I/O bus 234 at I/O control circuitry 212 and are writteninto command register 224. The addresses are received over input/output(I/O) pins [7:0] of bus 234 at I/O control circuitry 212 and are writteninto address register 214. The data may be received over input/output(I/O) pins [7:0] for a device capable of receiving eight parallelsignals, or input/output (I/O) pins [15:0] for a device capable ofreceiving sixteen parallel signals, at I/O control circuitry 212 and aretransferred to sense circuitry (e.g., sense amplifiers and page buffers)218. Data also may be output over input/output (I/O) pins [7:0] for adevice capable of transmitting eight parallel signals or input/output(I/O) pins [15:0] for a device capable of transmitting sixteen parallelsignals. It will be appreciated by those skilled in the art thatadditional circuitry and signals can be provided, and that the memorydevice of FIG. 2 has been simplified to help focus on the embodiments ofthe disclosure.

Additionally, while the memory device of FIG. 2 has been described inaccordance with popular conventions for receipt and output of thevarious signals, it is noted that the various embodiments are notlimited by the specific signals and I/O configurations described. Forexample, command and address signals could be received at inputsseparate from those receiving the data signals, or data signals could betransmitted serially over a single I/O line of I/O bus 234. Because thedata signals represent bit patterns instead of individual bits, serialcommunication of an 8-bit data signal could be as efficient as parallelcommunication of eight signals representing individual bits.

Methods for programming may be performed in various embodiments on amemory such as memory device 200. Such methods are shown and describedherein with reference to FIGS. 3-7.

Embodiments of the present disclosure offer improved performance ofprogramming in memories, such as in the number of programming pulsesused and in the time it takes to program (T_(prog)). Some embodimentsuse the concept of program disturb to program cells to intermediatetarget data states in a multi-level memory during the time that selectedcells are programmed to a highest target data state using a conventionalprogramming operation. Such embodiments may be referred to as boostedchannel programming (BCP), e.g., using a boosted channel voltage toslow, but not inhibit, programming of memory cells to lower (e.g.,intermediate) final data states while programming other memory cells tohigher (e.g., highest) final data states. For example, in a four levelMLC (i.e., 2 bits per cell), the four final data states are level 0(L0), level 1 (L1), level 2 (L2), and level 3 (L3). L0 is typicallyconsidered the lowest (final) target data state as it is typicallyassociated with the lowest threshold voltage range (e.g., −0.5 to −1.5V). Level 3 is typically considered the highest (final) target datastate as it is typically associated with the highest threshold voltagerange (e.g., 3.5 to 4.5 V). L1 and L2 are typically considered theintermediate (final) target data states as they are typically associatedwith threshold voltage ranges that are lower than the range associatedwith L3, but higher than the range associated with L0 (L2, e.g., 1.5 to2.5 V, and L1, e.g., 0.2 to 1.0 V).

FIG. 3 shows a method 300 of programming a memory such as memory 200shown above. Method 300 comprises, in one embodiment, programming cellsof the memory selected to be programmed to a particular (e.g., highest)target data state of the memory in block 302, and using program disturbto program cells of the memory selected to be programmed to lower targetdata states while programming the cells selected to be programmed to thehighest target data state in block 304. In a four level MLC, for cellsselected to be programmed, their control gates are biased at V_(pgm),and cells selected to be programmed to L3 are programmed with theirchannels at a reference voltage (e.g., ground), while cells selected tobe programmed to L2 and L1 are programmed with their channels boosted toan appropriate potential that slows down their programming. This enablesstarting programming pulses at a V_(pgm) appropriate for L3 programminginstead of L1 programming.

The cells to be programmed to the highest target data state areprogrammed in one embodiment with their channels at a reference voltage(e.g., ground). The cells to be programmed to the lower target datastates are programmed in one embodiment with boosted channel voltages.The channels are boosted to slow programming of the cells to beprogrammed to the lower target data states.

In one embodiment, boosted channel voltages are applied using amulti-level pass signal (V_(pass)). In a four level MLC, there could be,for example, three boosted channel voltages/a three-level pass voltage.In an eight level (three bits per cell) MLC, there could be, forexample, seven boosted channel voltages/a seven-level pass voltage.Applying a multi-level pass signal comprises, in at least oneembodiment, applying a stepped pass signal (e.g., a pass signalincreasing in constant or variable voltage steps), applying a graduatedpass signal (e.g., a pass signal increasing at an increasing ordecreasing rate), or applying a ramped pass signal (e.g., a pass signalincreasing at a constant rate).

Using program disturb to program cells of the memory selected to beprogrammed to lower target data states as in block 304 comprises in oneembodiment boosting a channel voltage for cells of the memory selectedto be programmed to lower target data states. In at least oneembodiment, boosting comprises applying a multi-step pass voltage toaccess lines of the memory prior to programming cells of the memory thatare selected to be programmed to the highest target data state.

At a first step of the multi-step pass voltage, data lines coupled tocells selected to be programmed to the lowest target data state areraised to an inhibit voltage, such as Vcc (e.g., to inhibitprogramming), before application of the first step of the multi-steppass voltage. At each subsequent step of the multi-step pass voltage,data lines coupled to cells selected to be programmed to a respectivenext highest target data state are raised to the inhibit voltage beforeapplication of the respective next step of the stepped pass voltage,until all data lines except data lines coupled to cells selected to beprogrammed to a highest target data state have been raised to theinhibit voltage. A program pulse is then applied to the cells selectedto be programmed (e.g., cells coupled to a selected access line).Although the multi-step pass voltage is applied to cells (in a blockbeing programmed) that are not selected to be programmed (e.g., it maybe applied to all unselected access lines of the block beingprogrammed), the program pulse is only applied to the cells thenselected to be programmed (e.g., the cells coupled to the selectedaccess line of the block).

In one embodiment, SSPC programming is implemented with the multi-steppass voltage. In traditional programming, SSPC is implemented byapplying a voltage through the data line, for example, applying an SSPCpotential on a data line through the drain select gate SGD.Implementation with the multi-step pass voltage enables a smaller SGDvoltage on boosted channel programming, which may further improveprogram disturb impacted by SGD leakage. Implementing SSPC programmingfurther comprises, in one embodiment, applying one of a plurality ofdifferent SSPC voltages to data lines coupled to cells selected to beprogrammed based on how close the respective cell is to its target datastate. For example, if a cell is close to its target data state, ahigher SSPC voltage may be applied to the corresponding data line inconjunction with the corresponding step of the multi-step Vpass;meanwhile, if the cell is not close to its target data state, a lowerSSPC voltage may be applied to the corresponding data line inconjunction with the respective step of the multi-step Vpass.

A timing diagram 400 for operation of the method of FIG. 3 for a fourlevel (two bits per cell) memory device embodiment is shown in FIG. 4.At time t₀, unselected bit lines 402 (e.g., bit lines that are coupledto cells of a selected word line that are to remain at L0) are raised toan inhibit voltage (e.g., V_(cc) or an SSPC voltage). A pass voltageV_(pass) (404), applied to both unselected access lines and the selectedaccess line, is raised at time t₁ in a first step 406 to a level 408,boosting the channel potential of the cells that are to remain at L0. Attime t₂, bit lines coupled to cells of a selected word line to beprogrammed to L1 (410) are raised to an inhibit voltage. The passvoltage is raised at time t₃ in a second step 412 to a level 414,boosting the channel potential of the cells that are to remain at L1 andfurther boosting the channel potential of the cells that are to remainat L0. At time t₄, bit lines coupled to cells of a selected word line tobe programmed to L2 (416) are raised to an inhibit voltage. The passvoltage is raised at time t₅ in a third step 418 to a level 420,boosting the channel potential of the cells that are to remain at L2 andfurther boosting the channel potential of the cells that are to remainat L0 and L1. Once the channels of all of the cells selected to beprogrammed to one of levels L0, L1, and L2 are boosted, at time t₆ aprogram voltage V_(pgm) is applied to the cells coupled to the selectedword line to program all of the selected cells, at the same time,towards their respective target data states.

The levels 408, 414, and 420 to which V_(pass) is raised are chosen toraise the voltages of the channels of cells to be programmed to L0, L1,and L2 to voltages appropriate to allow their programming using programdisturb at the same time cells to be programmed to L3 are normallyprogrammed. In one embodiment, a target threshold voltage for L3 cellsis identified as PV3, a target threshold voltage for L2 cells isidentified as PV2, and a target threshold voltage for L1 cells isidentified as PV1. L2 cell channels can be boosted to PV3-PV2, and L1cell channels can be boosted to PV3-PV1. For example, if PV3=4 volts,PV2=2 volts, and PV1=0.5 volts, then the channels of L2 cells can beboosted to PV3-PV2=2 volts, and the channels of L1 cells can be boostedto PV3-PV1=3.5 volts. L0 cell channels can be boosted for inhibit, toapproximately 7-8 volts. After application of the programming pulse, forexample in situations where more than a threshold number of cells arenot program verified after the pulse, the waveform may be repeated withcells that passed program verify in the pulse getting biased the same asunselected bit lines in subsequent pulses.

FIG. 5 illustrates an embodiment where SSPC is implemented with amulti-level V_(pass). At time t₀, unselected bit lines (e.g., bit linesthat are coupled to cells of a selected word line that are to remain atL0) are raised to an inhibit voltage (e.g., V_(cc) or an SSPC voltage),and a seed pulse is applied to the drain select gate (SGD). At time t₁,V_(pass) is raised to a first level 502 and applied to both unselectedword lines and the selected word line, boosting the channel potential ofcells that are to remain at L0. At time t₂, bit lines coupled to cellsof a selected word line to be programmed to L1 that are near their finaltarget data states, e.g., those cells coupled to a selected word linethat have reached an interim target data state (PPV1) near their finaltarget data state (as well as further boosting the channels of the L0cells) are raised to an inhibit voltage. At time t3, Vpass is raised toa second level 504 for boosting the channel potential of cells to beprogrammed to L1 that are near their final target data state. At timet₄, bit lines coupled to cells of a selected word line to be programmedto L1 that have not yet reached their interim target data state areraised to an inhibit voltage. At time t₅, V_(pass) is raised to a thirdlevel 506 for boosting the channel potential of cells to be programmedto L1 that have not yet reached their interim target data state (as wellas further boosting the channels of the L0 cells and the channels of theL1 cells that have reached their interim target data state). At time t₆,bit lines coupled to cells of a selected word line to be programmed toL2 that are near their final target data states, e.g., those cellscoupled to a selected word line that have reached an interim target datastate (PPV2) near their final target data state (as well as furtherboosting the channels of the L0 and L1 cells) are raised to an inhibitvoltage. At time t₇, V_(pass) is raised to a fourth level 508 forboosting the channel potential of cells to be programmed to L2 that arenear their final target data states, e.g., those cells coupled to theselected word line that have reached an interim target data state (PPV2)near their final target data state (as well as further boosting thechannels of the L0 and L1 cells). At time t₈, bit lines coupled to cellsof a selected word line to be programmed to L2 that have not yet reachedtheir interim target data state are raised to an inhibit voltage. Attime t₉, V_(pass) is raised to a fifth level 510 for boosting thechannels of cells to be programmed to L2 that have not yet reached theirinterim target data state. At time t₁₀, a program voltage V_(pgm) isapplied to the cells coupled to the selected word line to program all ofthe selected cells, at the same time, towards their respective targetdata states.

FIG. 6 shows graphically a difference between programming traditionallyand programming using embodiments of the present disclosure for a fourlevel (two bits per cell) memory. In a traditional programming method,programming pulses start at a V_(pgm) level of approximately 16 volts,incrementing with each successive programming pulse to approximately 23volts. Programming begins at pulse 1, where some of the cells selectedfor programming might start to reach their target data state L1, and byabout the fourth pulse, for example, some of the cells selected forprogramming might start to reach their target data state of L2. At aboutpulse 8, at a V_(pgm) of approximately 19 volts, some of the selectedcells might start reaching their target data state of L3, where all ofthe cells capable of being programmed to their target data state havelikely reached their respective target data state by about the 15thpulse (having a Vpgm of approximately 23V). In the embodiments of thepresent disclosure, because of the boosted channel voltages from themulti-step V_(pass) voltage, programming of all cells can begin at theV_(pgm) level traditionally used to start L3 programming, in thisexample at approximately 19 volts. Programming of all cells at levelsL1, L2, and L3 might then be accomplished in about 8 programming pulses,thus reducing the number of programming pulses used for programming from14 to 8. While example programming voltages have been discussed, itshould be understood that other programming voltages may be used, andthat the voltages depend on the particular programming and device,without departing from the scope of the disclosure.

In a programming operation, the waveform of FIG. 5 is applied after atleast one program pulse has been completed. The first pulse does not useSSPC. The verify (PPV/PV) information at the end of the first pulse isused to identify SSPC cells from the second pulse onwards.

While programming a memory with four level MLCs having four final targetdata states (L0, L1, L2, and L3) has been shown, it should be understoodthat the programming methods disclosed herein are suitable forprogramming multi-level cells having a fewer or a greater number ofinterim and/or final data states without departing from the scope of thedisclosure.

Another method 700 for programming a memory is shown in flow chart formin FIG. 7. Method 700 comprises in one embodiment applying a multi-levelpass signal to a plurality of groups of cells of the memory in block702, and subsequently applying a program pulse to a selected group ofcells of the plurality of groups of cells in block 704. Applying themulti-level pass signal in one embodiment boosts channel voltages for afirst subset of the selected group of cells such that the subsequentapplication of the program pulse causes the first subset of the selectedgroup of cells to be programmed towards one of a plurality of targetdata states other than a particular target data state to which a secondsubset of the selected group of cells are being programmed towards. Themulti-level pass signal may be a voltage signal or a current signal, andthe program pulse may be a voltage pulse or a current pulse.

CONCLUSION

In summary, one or more embodiments of the disclosure show boostedchannel programming for memories, in which channels of cells to beprogrammed to lower target data states are boosted using a multi-levelpass signal, and a programming pulse traditionally used for programmingcells towards a higher target data state is applied to all of theselected cells to program the selected cells towards their respectivetarget data states at the same time.

Although specific embodiments have been illustrated and describedherein, it will be appreciated by those of ordinary skill in the artthat any arrangement that is calculated to achieve the same purpose maybe substituted for the specific embodiments shown. Many adaptations ofthe disclosure will be apparent to those of ordinary skill in the art.Accordingly, this application is intended to cover any adaptations orvariations of the disclosure.

What is claimed is:
 1. A method of programming a memory, comprising:programming cells of the memory selected to be programmed to aparticular target data state of the memory; and using program disturb toprogram cells of the memory selected to be programmed to target datastates that are lower than the particular target data state whileprogramming cells of the memory selected to be programmed to theparticular target data state; and boosting a channel voltage for cellsof the memory selected to be programmed to the target data states thatare lower than the particular target data state.
 2. The method of claim1, wherein programming cells of the memory selected to be programmed toa particular target data state comprises programming cells of the memoryto be programmed to a highest target data state while their channels areat a reference voltage.
 3. The method of claim 1, wherein the channelsof the cells of the memory selected to be programmed to the target datastates lower than the particular target data state are boosted prior toprogramming the cells.
 4. The method of claim 3, wherein the target datastates lower than the particular target data state comprise first andsecond intermediate target data states, and further wherein channels ofthe cells of the memory selected to be programmed to the firstintermediate target data state are boosted to a voltage different than avoltage to which the channels of the cells of the memory selected to beprogrammed to the second intermediate target data state are boosted. 5.The method of claim 1, and further comprising applying a multi-levelpass signal to a block of cells of the memory prior to programming thecells of the memory selected to be programmed to the particular targetdata state, wherein the block of cells includes the cells selected to beprogrammed to the particular data state.
 6. The method of claim 1,wherein boosting comprises applying a multi-step pass signal to accesslines of the memory prior to programming the cells of the memoryselected to be programmed to the particular target data state.
 7. Themethod of claim 6, wherein boosting the channel voltage comprises:boosting a channel voltage for cells of the memory selected to beprogrammed to a first intermediate target data state to a first boostedvoltage; and boosting a channel voltage for cells of the memory selectedto be programmed to a second intermediate target data state to a secondboosted voltage that is different than the first boosted voltage.
 8. Themethod of claim 7, and further comprising applying an inhibit voltage todata lines coupled to cells of the memory selected to be programmed to alowest target data state prior to a first step of the multi-step passsignal.
 9. The method of claim 8, and further comprising: applying theinhibit voltage to data lines coupled to cells of the memory selected tobe programmed to the first intermediate target data state prior to asecond step of the multi-step pass signal; and applying the inhibitvoltage to data lines coupled to cells of the memory selected to beprogrammed to the second intermediate target data state prior to a thirdstep of the multi-step pass signal.
 10. The method of claim 9, whereinprogramming cells of the memory comprises applying a program pulse to aselected access line after the multi-step pass signal is applied. 11.The method of claim 10, wherein applying the inhibit voltage to datalines coupled to cells of the memory selected to be programmed to theintermediate target data states comprises applying at least one of aplurality of selective slow programming convergence (SSPC) voltages tothe respective data lines prior to the respective step of the multi-steppass signal.
 12. The method of claim 11, wherein the second step of themulti-step pass signal comprises a plurality of second steps and thethird step of the multi-step pass signal comprises a plurality of thirdsteps.
 13. The method of claim 12, wherein applying the multi-step passsignal comprises: raising a voltage of the pass signal by the first stepto boost the channel voltage for the memory cells selected to beprogrammed to the lowest target data state; raising the voltage of thepass signal by a first step of the plurality of second steps to boostthe channel voltage for the memory cells selected to be programmed tothe first intermediate target data state that have already reached afirst interim target data state; and raising the voltage of the passsignal by a second step of the plurality of second steps to boost thechannel voltage for the memory cells selected to be programmed to thefirst intermediate target data state that have not already reached thefirst interim target data state.
 14. The method of claim 13, whereinapplying the multi-step pass signal further comprises: raising thevoltage of the pass signal by a first step of the plurality of thirdsteps to boost the channel voltage for the memory cells selected to beprogrammed to the second intermediate target data state that havealready reached a second interim target data state; and raising thevoltage of the pass signal by a second step of the plurality of thirdsteps to boost the channel voltage for the memory cells selected to beprogrammed to the second intermediate target data state that have notalready reached the second interim target data state.
 15. A memorydevice, comprising: an array of memory cells; and a controllerconfigured to cause particular cells of the memory array coupled to aselected access line to be programmed towards a particular target datastate and to cause other cells of the memory array that are coupled tothe selected access line to be programmed towards target data statesother than the particular target data state using program disturb whileprogramming the particular cells of the memory array.
 16. A memorydevice, comprising: an array of memory cells; and a controllerconfigured to cause cells of the array of memory cells to be programmedby programming cells of the memory selected to be programmed to aparticular target data state of the memory, using program disturb toprogram cells of the memory selected to be programmed to target datastates that are lower than the particular target data state whileprogramming cells of the memory selected to be programmed to theparticular target data state, and boosting a channel voltage for cellsof the memory selected to be programmed to the target data states thatare lower than the particular target data state.
 17. A method ofprogramming a memory, comprising: applying a multi-level pass signal toa plurality of groups of cells of the memory; and subsequently applyinga program pulse to a selected group of cells of the plurality of groupsof cells, wherein applying the multi-level pass signal boosts channelvoltages for a first subset of the selected group of cells such that thesubsequent application of the program pulse causes the first subset ofthe selected group of cells to be programmed towards one of a pluralityof target data states other than a particular target data state to whicha second subset of the selected group of cells are being programmedtowards.
 18. The method of claim 17, wherein applying the multi-levelpass signal does not boost channel voltages for the second subset of theselected group of cells.
 19. The method of claim 17, wherein theplurality of groups of cells comprises a block of memory cells andwherein the selected group of cells comprises a page of the block ofmemory cells.
 20. The method of claim 19, further comprising applying aseed pulse to the drain select gates of the block prior to applying themulti-level pass signal.
 21. The method of claim 17, wherein applying amulti-level pass signal comprises applying a stepped pass signal. 22.The method of claim 17, wherein applying a multi-level pass signalcomprises applying a graduated pass signal.
 23. The method of claim 17,wherein applying a multi-level pass signal comprises applying a rampedpass signal.
 24. The method of claim 17 wherein applying a multi-levelpass signal comprises applying a multi-level voltage signal.
 25. Anapparatus comprising: an array of memory cells; and a controllerconfigured to cause a multi-level pass signal to be applied to aplurality of groups of cells of the memory array and to subsequentlycause a program pulse to be applied to a selected group of cells of theplurality of groups of cells, wherein applying the multi-level passsignal boosts channel voltages for a first subset of the selected groupof cells such that the subsequent application of the program pulsecauses the first subset of the selected group of cells to be programmedtowards one of a plurality of target data states other than a particulartarget data state to which a second subset of the selected group ofcells are being programmed towards.
 26. The apparatus of claim 25,wherein the apparatus comprises a memory device including the memoryarray and the controller.
 27. The apparatus of claim 26, wherein thememory array and the controller are included in a single package. 28.The apparatus of claim 26, wherein the controller is included on a samesemiconductor die as the memory array.
 29. The apparatus of claim 26,wherein the controller is included on a different semiconductor die thanthe memory array.